DOI: 10.1016/j.jobe.2024.109397

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DOI: 10.1016/j.jobe.2024.109397

Paper Summary:

Title: Optimizing HVAC systems for semiconductor fabrication: A data-intensive framework for energy efficiency and sustainability

Author(s): Ni, Hsiao-Ping (author);Chong, Wai Oswald (author);Chou, Jui-Sheng (author)

Year: 2024

DOI: 10.1016/j.jobe.2024.109397

URL: https://doi.org/10.1016/j.jobe.2024.109397

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