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✍: FYIcenter
FYIcenter.com Generated Result:
Specified DOI: 10.1016/j.tsf.2017.03.047 Found ✔
Citation in AMA style:
Citation in APA style:
Citation in MLA style:
Citation information in BibTeX format:
@article{Kim_2017,
title={Angular dependences of SiO2 etch rates at different bias voltages in CF4, C2F6, and C4F8 plasmas},
volume={637},
ISSN={0040-6090},
url={http://dx.doi.org/10.1016/j.tsf.2017.03.047},
DOI={10.1016/j.tsf.2017.03.047},
journal={Thin Solid Films},
publisher={Elsevier BV},
author={Kim, Jun-Hyun and Cho, Sung-Woon and Park, Chang Jin and Chae, Heeyeop and Kim, Chang-Koo},
year={2017},
month=Sept,
pages={43–48}
}
2026-06-08, ≈54🔥, 0💬
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