DOI: 10.1103/physrevmaterials.1.033402

Paper Summary:

Title: Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN/Al0.72Sc0.28N multilayers

Author(s): Sands, Timothy

Year: 2017

DOI: 10.1103/physrevmaterials.1.033402

URL: https://doi.org/10.1103/physrevmaterials.1.033402

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Received on: 2025-04-16

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