Other Resources:
DOI: 10.1002/CEAT.201700126
Paper Summary:
Title: Angular Dependence of Si 3 N 4 Etching in C 4 F 6 /CH 2 F 2 /O 2 /Ar Plasmas
Author(s): Kim, Jun-Hyun; Cho, Sung-Woon; Kim, Chang-Koo
Year: 2017
DOI: 10.1002/CEAT.201700126
URL: https://doi.org/10.1002/CEAT.201700126
Received on: 2023-11-16
✍: FYIcenter.com
2023-11-18, 741👍, 0💬
Popular Posts:
Paper Summary: DOI: 10.1007/s00710-024-00868 -zReceived on: 2024-08-27
How to use XML API URL, doi.crossref.org/servlet /query?id={doi},for DOI-to-metadata query? XML API ...
Paper Summary: Title: How the Mind Hurts and Heals the Body. Author(s): Ray, Oakley Year: 2004 DOI: ...
Paper Summary: Title: Test Method for Purity by Differential Scanning Calorimetry DOI: 10.1520/E0928...
Paper Summary: Title: Do sustainable institutional investors contribute to firms’ environmental perf...