Database DOI General ISSN ORCID Paper

DOI: 10.1143/JJAP.41.4074

Paper Summary:

Title: Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors

Author(s): Braun, Stefan; Mai, Hermann; Moss, Matthew; Scholz, Roland; Leson, Andreas

Year: 2002

DOI: 10.1143/JJAP.41.4074

URL: https://doi.org/10.1143/JJAP.41.4074

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Received on: 2024-07-01

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Database DOI General ISSN ORCID Paper