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DOI: 10.1143/JJAP.41.4074
Paper Summary:
Title: Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors
Author(s): Braun, Stefan; Mai, Hermann; Moss, Matthew; Scholz, Roland; Leson, Andreas
Year: 2002
DOI: 10.1143/JJAP.41.4074
URL: https://doi.org/10.1143/JJAP.41.4074
Received on: 2024-07-01
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